%0 Journal Article %A Nassif, Sani R. %D 1982 %T Extensions to an integrated circuit manufacturing process simulator %U https://kilthub.cmu.edu/articles/journal_contribution/Extensions_to_an_integrated_circuit_manufacturing_process_simulator/6468770 %R 10.1184/R1/6468770.v1 %2 https://kilthub.cmu.edu/ndownloader/files/11897321 %K Integrated circuits. %K Simulated methods. %X technical report %I Carnegie Mellon University