@article{Luo2018, author = "Hao Luo and Gary K. Fedder and L. Carley", title = "{A 1 mG lateral CMOS-MEMS accelerometer}", year = "2018", month = "6", url = "https://kilthub.cmu.edu/articles/journal_contribution/A_1_mG_lateral_CMOS-MEMS_accelerometer/6549944", doi = "10.1184/R1/6549944.v1" }