The dataset will serve as supplemental material for a peer-reviewed journal article (Applied Physics Letters) currently under review. The funding agency (NSF) has requested that the data be made available through an open source platform.
The raw data include all in-situ XRD scans perfomred on α-Ga2O3, κ(ε)-Ga2O3 and γ-Ga2O3 thin films under three different environments (air, N2 and vacuum) in the temperature range from 25 ℃ to 900 ℃.