<p>The dataset will serve as supplemental material for a peer-reviewed journal article (Applied Physics Letters) currently under review. The funding agency (NSF) has requested that the data be made available through an open source platform.</p>
<p>The raw data include all in-situ XRD scans perfomred on α-Ga<sub>2</sub>O<sub>3</sub>, κ(ε)-Ga<sub>2</sub>O<sub>3</sub> and γ-Ga<sub>2</sub>O<sub>3 </sub>thin films under three different environments (air, N<sub>2</sub> and vacuum) in the temperature range from 25 ℃ to 900 ℃. </p>