Inclusion SEM analysis of the same calcium aluminate inclusions at 10, 15, & 20 kV accelerating voltages

The dataset is compiled from the analyses of the same calcium aluminate inclusions at 10, 15, and 20 kV accelerating voltages. Two files are included. The first pertains to the analyses at varying spot sizes and using a reference GSV of 200 for Fe and 70 for Al. The second to the analyses at fixed spot size (40%), using reference GSV of 170 for Fe and 100 for Al.