journal contribution
posted on 1996-01-01, 00:00 authored by Gary K. Fedder Computer-aided design tools tailored for microelectromechanical
systems (MEMS) are needed to enable
design of complex systems with multiple energy
domains. In an analogy to the VLSI design methodology,
physical, structural, and behavioral views of
MEMS can be formed and coupled together in an
integrated toolset. Of key importance is the formation
of parameterized MEMS component libraries to support
these views. Fast coupled-domain numerical
(physical) simulation and behavioral simulation are
required to move freely between the views.
History
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1996-01-01