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Simulation and Characterization of a CMOS Z-axis Microactuator with Electrostatic Comb Drives

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journal contribution
posted on 01.01.2000, 00:00 authored by Huikai Xie, Lars Erdmann, Qi Jing, Gary K. Fedder
This paper reports the first design and its simulation and experimental results of a CMOS z-axis microactuator that utilizes the vertical electrostatic forces existing between multi-conductor comb fingers. The measured maximum displacement of the z-axis microactuator is 3.5 mm, and resonant frequency 6.17 kHz, which are in good agreement with the field simulation and the behavioral simulation results using the NODAS library [1]. The advantages of the z-axis actuator include compatibility with standard CMOS processes and easy implementation of 3-axis microstages, integrated position sensing components and motion control circuits.