Micromachining Metrology: Measurement and Analysis of Dynamic Tool-tip Trajectory when using Ultra-High-Speed Spindles

There is a growing demand for miniature, high-precision components and devices with micro-scale features for applications in biomedical systems, aerospace structures, and energy storage/conversion systems. Mechanical micromachining has become a leading approach to address this demand. In micromachining, a micro-scale cutting tool, such as a micro-endmill with a diameter as small as 10 um, is rotated by an ultra-high-speed (UHS) spindle (speeds greater than 60,000 rpm, reaching up to 500,000 rpm) to mechanically remove the material from a workpiece. Although micromachining resembles the traditional computer numerically controlled (CNC) machining processes, the micron-scale cutting tools, ultra-high-speed (UHS) spindles, and considerably tighter tolerance requirements bring unique challenges to micromachining.